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pro vyhledávání: '"Franziska Jenkner"'
Autor:
Georg Krugel, Anamaria Moldovan, Winfried Wolke, Ralf Preu, Franziska Jenkner, Jochen Rentsch
In this paper, the properties of hydrogenated aluminum nitride layers (AlN:H) as an excellent passivation layer of silicon surfaces are examined. The structural and chemical properties of the AlN:H bulk are analyzed using a great variety of measureme
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3d9eb3d8f1fce7b74a09ddd0fb1124f9
https://publica.fraunhofer.de/handle/publica/238270
https://publica.fraunhofer.de/handle/publica/238270