Zobrazeno 1 - 10
of 27
pro vyhledávání: '"Franz Schaefers"'
Publikováno v:
The Journal of Physical Chemistry C. 120:8979-8985
γ-Al2O3 layers fabricated by annealing-induced crystallization of ALD-grown amorphous (a-) Al2O3 films were studied using near-edge-X-ray absorption fine structure, soft X-ray reflection spectroscopy, photoelectron spectroscopy, internal photoemissi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4cb2a89b5d42a89b1f0221d7fc01c1f3
https://doi.org/10.1021/acs.jpcc.6b01352
https://doi.org/10.1021/acs.jpcc.6b01352
Akademický článek
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Autor:
Igor V. Kozhevnikov, M. Popovici, A. S. Konashuk, Elena O. Filatova, Valeri Afanas'ev, Andrey Sokolov, Franz Schaefers
Publikováno v:
Journal of Electron Spectroscopy and Related Phenomena. 196:110-116
We explored the possibility to quantify the atomic in-depth distributions by using the energy-dependent soft X-ray reflectivity (SXRR) measurements, in particular, the possibility to obtain the profiles of low- Z elements [C, N, O, Si] in heterostruc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca2529b17de9823efb59eab31822698c
https://doi.org/10.1016/j.elspec.2014.01.021
https://doi.org/10.1016/j.elspec.2014.01.021
Publikováno v:
Journal of Electron Spectroscopy and Related Phenomena. 196:117-120
The effect of post deposition annealing and Al2O3 interlayer introduced between the film and substrate on the nitrogen content in TiN films in TiN/SiO2/Si structures were studied using near-edge X-ray absorption fine structure (NEXAFS) spectroscopy.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6de11cae161471d51dbdc06fb60d4e91
https://doi.org/10.1016/j.elspec.2013.12.001
https://doi.org/10.1016/j.elspec.2013.12.001
Autor:
Franz Schaefers, Andrey Sokolov, O. Yu. Vilkov, Elena O. Filatova, Mihaela Gorgoi, Igor V. Kozhevnikov, A. S. Shulakov, Yu V. Yegorova, A. S. Konashuk
Publikováno v:
Microelectronic Engineering. 109:13-16
Graphical abstractDisplay Omitted Air-exposed Sr-rich-SrTiO3/B/Si-ALD systems (B: SiO2, Si3N4 and HfO2) are studied.Surfaces of all the films are carbonate-enriched by SrCO3 compound.Density of films and Si-B interface width depends on the interlayer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f41a454ac07bddf58ff04b013cda8d6e
https://doi.org/10.1016/j.mee.2013.03.095
https://doi.org/10.1016/j.mee.2013.03.095
Publikováno v:
Thin Solid Films. 534:363-366
The structure of alumina (Al 2 O 3 ) films with different thickness grown by the atomic layer deposition method on porous silica substrates has been studied using soft X-ray reflection spectroscopy. It was established that synthesized films were amor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::123cf770a01953eca2245f1a4341b4e2
https://doi.org/10.1016/j.tsf.2013.03.020
https://doi.org/10.1016/j.tsf.2013.03.020
Autor:
Andrey Sokolov, Walter Braun, Galina Shevchenko, Elena.Yu. Taracheva, Igor V. Kozhevnikov, Elena O. Filatova, Franz Schaefers, Sergey Yulin
Publikováno v:
physica status solidi (b). 246:1454-1458
The paper shows the importance of soft X-ray reflection spectroscopy as a non-destructive in-depth characterization tool for the middle atomic ordering in TiO2 thin films. The microstructure of TiO2 films synthesized by magnetron sputtering on Si(100
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ee0b543b5e1638fc123c628a62de0130
https://doi.org/10.1002/pssb.200945069
https://doi.org/10.1002/pssb.200945069
Autor:
Soham Mukherjee, Jan Rusz, Vancho Kocevski, Franz Schaefers, Tomohiro Shibata, Carlo U. Segre, D. D. Sarma, Soma Chattopadhyay, Céline Gérard, Olle Eriksson, Mahalingam Balasubramanian, Angshuman Nag, Pralay K. Santra
Publikováno v:
Physical Review B
Extended x-ray absorption fine-structure studies have been performed at the Zn K and Cd K edges for a series of solid solutions of wurtzite Zn1-xCdxS samples with x = 0.0, 0.1, 0.25, 0.5, 0.75, and 1.0, where the lattice parameter as a function of x
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd2a1c366e47fc6e88780de5f406f5b5
Autor:
Yu. Ya. Platonov, E. A. Shamov, S. S. Andreev, L. A. Shmaenok, Franz Schaefers, N. N. Salashchenko, H.-Ch. Mertins
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 448:133-141
We report the experimental results on production of multilayer soft X-ray and EUV mirrors and their application in X-ray spectroscopy of the high-temperature plasma and used as polarizers and polarimeters. The problem of the producing and investigati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2d74a728b1e8031df65b2144ea9a3111
https://doi.org/10.1016/s0168-9002(00)00211-4
https://doi.org/10.1016/s0168-9002(00)00211-4
Autor:
C. Ozkan, Serguei L. Molodtsov, Jens Buck, Franz Schaefers, Ivo Zizak, Wolfgang Freund, Jan Gruenert, Alexei Erko, Jens Rehanek
Publikováno v:
SPIE Proceedings.
At the European X-ray Free Electron Laser facility one‐ or two‐ Si(111) channel (cut) crystal X‐ray monochromator (Kmonochromator) are planned for photon beam based alignment: gap tuning of the undulator segments and phase tuning of the phase s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ecad7ec4952eff678ff6531c507323a1
https://doi.org/10.1117/12.929755
https://doi.org/10.1117/12.929755