Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Franz Lärmer"'
Publikováno v:
Microfluidics and Nanofluidics. 26
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54e56001a2e74ab9d58dbb48fe3cb09e
https://doi.org/10.1007/s10404-022-02545-z
https://doi.org/10.1007/s10404-022-02545-z
Autor:
Franz Lärmer, Thomas Brettschneider, Yvonne Beyl, Roland Zengerle, Daniel Czurratis, Sven Zinober, Alexander Grimm
Publikováno v:
Lab on a chip. 15(13)
Liquids on-chip describes a reagent storage concept for disposable pressure driven Lab-on-Chip (LoC) devices, which enables liquid storage in reservoirs without additional packaging. On-chip storage of liquids can be considered as one of the major ch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dbfb018a92a5e5748c22c1a816eeb2ea
https://pubmed.ncbi.nlm.nih.gov/26038101
https://pubmed.ncbi.nlm.nih.gov/26038101
Autor:
Ann Witvrouw, Arnim Höchst, Silvia Kronmüller, Cristina Rusu, Frank Fischer, Heiko Stahl, Ralf Reichenbach, Lars Metzger, S. Watcham, Roland Scheuerer, R. Gunn, Franz Lärmer
Publikováno v:
Sensors and Actuators A: Physical. 114:355-361
We show a wafer-level encapsulation technique for microelectromechanical system (MEMS). The process flow for fabrication and encapsulation of a MEMS accelerometer is presented. The main features of the approach are the use of a second sacrificial lay
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e1a721f771a01710671bbbd31f1171a
https://doi.org/10.1016/j.sna.2003.12.020
https://doi.org/10.1016/j.sna.2003.12.020
Autor:
B. Parmentier, Cristina Rusu, V. Leca, B. Otter, Franz Lärmer, Sherif Sedky, Agnes Verbist, Ann Witvrouw, Silvia Kronmüller, Olivier Richard, Frank Fischer, Bert Brijs, L. Geenen
Publikováno v:
Journal of microelectromechanical systems, 12(6), 816-825. IEEE
Thick poly-SiGe layers, deposited by plasma-enhanced chemical vapor deposition (PECVD), are very promising structural layers for use in microaccelerometers, microgyroscopes or for thin-film encapsulation, especially for applications where the thermal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::306f61ed15d598b63789cdc61d3e1385
https://doi.org/10.1109/jmems.2003.820304
https://doi.org/10.1109/jmems.2003.820304
Publikováno v:
Journal of Micromechanics and Microengineering. 6:177-186
This paper starts with a short review on interferometric methods for optical analysis of resonant structures. Three important types of resonant sensor elements are then discussed: a piezoelectrically driven beam as the strain sensitive element of a b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71b6924c8276c432945ce0caca8fc31a
https://doi.org/10.1088/0960-1317/6/1/037
https://doi.org/10.1088/0960-1317/6/1/037
Publikováno v:
Journal of Micromechanics and Microengineering. 5:143-146
This paper presents a resonant force sensor comprising piezoelectric ZnO thin-film transducers for excitation and detection of resonant beam vibrations. A short description of the processing technique is given, i.e. deposition and passivation of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d15e20a98da597c003e0bebe6e4801d6
https://doi.org/10.1088/0960-1317/5/2/022
https://doi.org/10.1088/0960-1317/5/2/022
Autor:
Srinivas Tadigadapa, Franz Lärmer
Publikováno v:
MEMS Reference Shelf ISBN: 9780387473161
Dry etching processes provide the tools to machine precision high-aspect-ratio structures that form the basic building blocks of microelectromechanical systems. Dry etching processes consist of (1) purely chemical (spontaneous gas phase etching), (2)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::168df8b8b00a472a26120db3aa538f77
https://doi.org/10.1007/978-0-387-47318-5_7
https://doi.org/10.1007/978-0-387-47318-5_7
Autor:
Stefan Finkbeiner, Kurt Weiblen, Harald Neumann, Bob Sulouff, Michael Offenberg, Winfried Schönenborn, Hans-Martin Wiedenmann, Toshio Honma, Roland Müller-Fiedler, Frank Schatz, Franz Lärmer, Henrik Siegle, Jan Peter Stadler, Ralf Henn, Gottfried Flik, Matthias Fürtsch, Johann Riegel, Henrik Jakobsen, Daniel Lapadatu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f97990ccdcef36643de91d6bf384794
https://doi.org/10.1002/9783527619252.ch5h
https://doi.org/10.1002/9783527619252.ch5h
Publikováno v:
Journal of Micromechanics and Microengineering. 25:045002
On-chip storage of liquids is one of the major challenges of polymer-based lab-on-a-chip (LoC) devices. To ensure long-term storage of even highly volatile reagents in polymer disposal LoC cartridges, robust reagent storage concepts are necessary. Tu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f2d4e1e54fdaf0cbd2482bebb539d40
https://doi.org/10.1088/0960-1317/25/4/045002
https://doi.org/10.1088/0960-1317/25/4/045002
Publikováno v:
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
A monolithic sensor, fabricated using a technology that combines surface micromachining with a BiCMOS process, is described. The capacitive sensing element consists of a 10/spl mu/m thick layer of polysilicon that is deposited in an early stage of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8eccf7d5554594b4ed0334ebe608ddbf
https://doi.org/10.1109/sensor.1995.717293
https://doi.org/10.1109/sensor.1995.717293