Zobrazeno 1 - 10
of 49
pro vyhledávání: '"Franz Heider"'
Autor:
Sasmita Srichandan, Franz Heider, Yulia Polak, Georg Ehrentraut, Laszlo Juhasz, Martin Haberjahn, Egidijus Sakalauskas, Ronny Haupt
Publikováno v:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c0d4c616ed6cfc4d2eeb3b50817e7bd1
https://doi.org/10.1109/asmc57536.2023.10121130
https://doi.org/10.1109/asmc57536.2023.10121130
Publikováno v:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5d38a628749fa821a6727ec441a3bc81
https://doi.org/10.1109/asmc54647.2022.9792504
https://doi.org/10.1109/asmc54647.2022.9792504
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Roughness measurements on epitaxial layers before and after etching were done with an atomic force microscope (AFM) with sub-Angstrom repeatability. Furthermore, surface roughness was monitored with AFM after chemical mechanical polishing, before a w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8c76a9c55ab8e951497f8c622491d25
https://doi.org/10.1109/asmc.2019.8791811
https://doi.org/10.1109/asmc.2019.8791811
Autor:
Kin Loon Chow, Jeffrey W. Roberts, Franz Heider, Christian Janeschitz, Martin Haberjahn, Chi Eng New
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The depth between an oxide at the wafer surface and a poly silicon plug in a trench was determined with scatterometry using a polarized reflectometer. Poly recess depth is an important parameter in trench MOSFET technologies that needs to be monitore
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e080a0dad7e4a3a883eb1ce5f7b9a1c
https://doi.org/10.1109/asmc.2016.7491102
https://doi.org/10.1109/asmc.2016.7491102
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Optical profilometer measurements are contact-free and fast. The depth of single high-aspect-ratio trenches and the step height of opaque materials can be measured. Deep trenches (50–225 µm) are measured with a white light interferometer. Shallowe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6dd59643dce1385147a889ca2c3f9b7e
https://doi.org/10.1109/asmc.2015.7164456
https://doi.org/10.1109/asmc.2015.7164456
Publikováno v:
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
Epitaxial silicon layers with low and intermediate resistivity were investigated with a contact-free capacitance versus voltage method. The low resistivity sample with 0.15 Ohm cm had long-term repeatability and reproducibility over 3 days with a fra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66486dcd14fad734211259285e8b593d
https://doi.org/10.1109/asmc.2014.6847015
https://doi.org/10.1109/asmc.2014.6847015
Autor:
Lu Yu, Florian Flach, Martin Haberjahn, T. Shapoval, Qing Ye, Walter Petersmann, Jianli Cui, Ronny Haupt, Franz Heider
Publikováno v:
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
The resistivity (doping level) in epitaxial and implant layers has high impact on electrical device parameters of power semiconductors. However, precise control of electrical layer resistivity with the four-point-probe (4PP) technique is still challe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::855958e73486b96aba294292ee9acc7e
https://doi.org/10.1109/asmc.2014.6846991
https://doi.org/10.1109/asmc.2014.6846991
Publikováno v:
Physics of the Earth and Planetary Interiors. 126:59-73
The apparent successful application of the Thellier’s method of paleointensity or paleofield direction determinations on multi-domain (MD) and pseudo-single-domain (PSD) grains suggests the validity of the Thellier’s laws of independence and addi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef249b3b8a3a8c9c42fe4432707ffdf7
https://doi.org/10.1016/s0031-9201(01)00244-8
https://doi.org/10.1016/s0031-9201(01)00244-8
Autor:
Franz Heider, Adrian R. Muxworthy
Publikováno v:
Studia Geophysica et Geodaetica. 45:283-296
Five samples from historical lava flows on Mt. Etna, which had previously been used in a palaeointensity study, were examined using a combination of rock magnetic and microscopic techniques to elucidate the causes of failure of palaeointensity determ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a63a01873e6b05abb46f6a85022990eb
https://doi.org/10.1023/a:1022036229596
https://doi.org/10.1023/a:1022036229596
Publikováno v:
Earth and Planetary Science Letters. 184:141-154
A record of an excursion of the Earth’s magnetic field was found in a ∼14.3 Myr old lava sequence of the shield basalts from Gran Canaria (Canary Islands). The thermal and alternating field demagnetization of the samples from 14 subsequent lava f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8242ff2133e21194698aac6efc024bd2
https://doi.org/10.1016/s0012-821x(00)00311-3
https://doi.org/10.1016/s0012-821x(00)00311-3