Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Frank T. Hartley"'
Publikováno v:
Journal of Micromechanics and Microengineering. 6:352-358
In this paper, we discuss the fabrication and initial testing of a bulk micromachined single axis accelerometer. The accelerometer is designed to have a full scale range of and a sensitivity of . Three distinctly different dice are fabricated during
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ced41e842dbee0d17e0e7c95f0aef57c
https://doi.org/10.1088/0960-1317/6/3/008
https://doi.org/10.1088/0960-1317/6/3/008
Publikováno v:
Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing.
Advances in blazed grating fabrication through electron-beam and x-ray lithography are presented, which allow the realization of concentric spectrometer forms with highly desirable properties covering a wide variety of applications, from airborne and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6acd157e977b3c254d7ec40f21764691
https://doi.org/10.1364/fio.2004.fwt2
https://doi.org/10.1364/fio.2004.fwt2
Autor:
Martin Feldman, Todd R. Christenson, Pantazis Mouroulis, Aidan Shori, Li Jiang, Richard E. Muller, Daniel W. Wilson, Frank T. Hartley
Publikováno v:
SPIE Proceedings.
Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. They can be generated over a considerable depth for use anywhere in the ultraviolet to middle in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::638a013d0c90846d884a4e8d4d312122
https://doi.org/10.1117/12.503200
https://doi.org/10.1117/12.503200
Autor:
I. Kanik, Frank T. Hartley
Publikováno v:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.
The Jet Propulsion Laboratory (JPL) has developed a novel nanometer-thick "Soft Ionization Membrane" (SIM) which is capable of ionizing nearly 100% of the gases that pass through it. Both sides of the membrane are coated with a metallic conducting fi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2eb3bfd7eccac081c7107f7090790b3d
https://doi.org/10.1117/12.484271
https://doi.org/10.1117/12.484271
Publikováno v:
Micro-Opto-Electro-Mechanical Systems.
We discuss here the capability of direct manufacture of various high- resolution diffractive optics, in particular regarding micromachining of DOEs in 3D. Preliminary demonstrations were made in 2-D using an automated FIB system operated at 30 KeV wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c62c72ca141ce6a666a18f1452dc0b4c
https://doi.org/10.1117/12.397932
https://doi.org/10.1117/12.397932
Publikováno v:
SPIE Proceedings.
We discuss here the capability and details of direct manufacture of various high-resolution diffractive optics using focused ion beam (FIB) micromachining. In preliminary demonstrations illustrating the capability of the technique, zone plates and gr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::10bef8633365795ec8377c3d44900cb0
https://doi.org/10.1117/12.390040
https://doi.org/10.1117/12.390040
Publikováno v:
SPIE Proceedings.
New developments for X-ray nanomachining include pattern transfer onto non-planar surfaces coated with electrodeposited resists using synchrotron radiation X-rays through extremely high-resolution masks made by chemically assisted focused ion beam li
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::22612aae043b5963b4b270072ba17b9b
https://doi.org/10.1117/12.368464
https://doi.org/10.1117/12.368464
Autor:
Frank T. Hartley
Publikováno v:
SPIE Proceedings.
This paper describes reversed engineered biological peristaltics through the insightful evolution of MEMS technology. While the emphasis on pump applications is in the miniaturization of spacecraft bus and payload, terrestrial applications are eviden
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28027e4c8a7c9b25fdb5a060579a72d1
https://doi.org/10.1117/12.364470
https://doi.org/10.1117/12.364470
Autor:
Frank T. Hartley
Publikováno v:
SPIE Proceedings.
The ultra-sensitive accelerometer, developed for NASA to monitor the microgravity environments of Space Shuttle, free orbitors and Space Station, needed to measure accelerations up to 10 mg with an absolute accuracy of 10 nano-g for at least two orbi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3bcdb1f74868c48cfa60682b33f58384
https://doi.org/10.1117/12.364471
https://doi.org/10.1117/12.364471
Publikováno v:
SPIE Proceedings.
Proximity printing using synchrotron X-ray lithography provides high resolution pattern transfer with large depth of field, low diffraction effects and no reflection from the substrate. Electro-plating of photo-resist allows deposition of thin, unifo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6828f71b9a60a8502d556d3526c91524
https://doi.org/10.1117/12.309615
https://doi.org/10.1117/12.309615