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pro vyhledávání: '"Frank F. Wenners"'
Autor:
Frank F. Wenners, Russell Mello, Don E. Yansen, Tuan Ngo, Kathryn E. Noll, James P. Nadeau, Raymond R. Hill, Michael Siebers, Gregory J. Athas
Publikováno v:
SPIE Proceedings.
We have developed a focused ion beam (FIB) system for automated MEMS processing. This product, the Micrion MicroMill, has been successfully used in production and prototype milling of over three million thin film heads (TFH) used in hard disk drives.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2eb8d481ea2ef185aeea76cc43f5850e
https://doi.org/10.1117/12.284481
https://doi.org/10.1117/12.284481
