Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Frank Best"'
Autor:
Stefanie Lanzinger, Frank Best, Tanja Bergmann, Markus Laimer, Boris Lipovsky, Thomas Danne, Stefan Zimny, Peter Bramlage, Svenja Meyhöfer, Reinhard W. Holl
Publikováno v:
Diabetes Technology & Therapeutics. 24:763-769
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f10b1c9d7d09bcebe40f93467cf8276b
https://doi.org/10.1089/dia.2022.0063
https://doi.org/10.1089/dia.2022.0063
Autor:
Peter Ten Berge, Nico Noordam, Jean-Marie Quemper, Stephane Pocas, Pascale Maury, Dick Van Vliet, Keith Frank Best
Publikováno v:
Microelectronic Engineering. 87:904-906
We propose a method to image inside deep trenches (50@mm) using spray-coated resist and the ASML PAS 5500/100 system with the new functionality multi-step imaging. Multi-step imaging allows extending the focus offset range of the PAS 5500/100 system
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ea29feb42e9699e774bb7635240adf5
https://doi.org/10.1016/j.mee.2009.12.011
https://doi.org/10.1016/j.mee.2009.12.011
Publikováno v:
Emerging Lithographic Technologies VI.
ASML-Special Applications has shown its ability to align and quantify overlay in thick films to address alignment and metrology challenges in the Micro-Electromechanical Systems (MEMS) field. These methods apply to any thick film material layers > 5
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::692e85fcf85dac055adf6afa7a544d41
https://doi.org/10.1117/12.472299
https://doi.org/10.1117/12.472299
Publikováno v:
Europe PubMed Central
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid_dedup__::1f392589fdbe5486bf9f92c4ebb7c472
https://pubmed.ncbi.nlm.nih.gov/6443218
https://pubmed.ncbi.nlm.nih.gov/6443218