Zobrazeno 1 - 10
of 109
pro vyhledávání: '"Francoise K. LeGoues"'
Publikováno v:
Microscopy Research and Technique. 42:281-294
The in situ transmission electron microscope allows us to visualise processes occurring at surfaces and interfaces in real time and is therefore capable of providing detailed, quantitative information about reaction mechanisms. We have used a UHV TEM
Autor:
Eric A. Stach, Francoise K. LeGoues, Rudolf M. Tromp, Mark C. Reuter, John C. Bean, Matthew Copel, Robert Hull
Publikováno v:
Journal of Applied Physics. 83:1931-1937
We have measured the velocity of misfit dislocation threading segments in real time during ultrahigh vacuum (UHV) chemical vapor deposition heteroepitaxial growth of thin SiGe epilayers on Si (001) using ultrahigh vacuum transmission electron microsc
Autor:
J. O. Chu, Francoise K. LeGoues, Bernard S. Meyerson, L. P. Tilly, F. Cardone, Patricia M. Mooney, Christopher P. D'Emic
Publikováno v:
Journal of Applied Physics. 82:688-695
Two shallow hole traps dominate the deep level transient spectroscopy (DLTS) data for strain-relaxed Si0.7Ge0.3 layers grown on Si(100) by ultrahigh vacuum chemical vapor deposition at temperatures ⩽560 °C. The trap energy levels are at Ev+0.06 an
Autor:
M. A. Lutz, Randall M. Feenstra, J. O. Chu, Patricia M. Mooney, Francoise K. LeGoues, Jean Jordan-Sweet
Publikováno v:
Journal of Applied Physics. 80:89-96
Grazing‐incidence x‐ray diffraction (GIXD) permits the direct measurement of in‐plane lattice parameters of SiGe films that are too thin to yield good results from normal‐geometry triple‐axis techniques. A unique ‘‘X’’‐shaped patt
Publikováno v:
Surface Science. 349:129-144
We use ultrahigh vacuum transmission electron microscopy (UHV-TEM) to study the growth of Ge on Si(001) in real time at different temperatures and for coverages ranging from the initial monolayers to the development and relaxation of 3D islands. Duri
Publikováno v:
Surface Science. 349:249-266
We have used the UHV-TEM to study the growth of Ge on Si(111) in situ, from the deposition of the first monolayer to complete relaxation by the introduction of dislocations. We show that, at 650°C, the growth of Ge islands is dominated by steps on t
Publikováno v:
Physical Review Letters. 74:2706-2709
Publikováno v:
Journal of Applied Physics. 75:7240-7246
The relaxation in Si/SiGe bilayers grown on top of SIMOX wafers has been studied. By judiciously choosing the thickness ratios of the Si and SiGe, it is possible to relax the bilayer through the glide of dislocations exclusively in the Si layer, leav
Autor:
Francoise K. LeGoues, Jerry Tersoff
Publikováno v:
Physical Review Letters. 72:3570-3573
We show that strained epitaxial layers can relax by two competing mechanisms. At large misfit, the surface becomes rough, allowing easy nucleation of dislocations. However, strain-induced surface roughening is thermally activated, and the energy barr
Publikováno v:
Journal of Applied Physics. 75:3968-3977
A comprehensive x‐ray‐diffraction study of the variation of the tilt angle between a Si1−xGex layer and the (001) Si substrate is presented. Such measurements provide the basis of a new method for determining the nucleation activation energy of