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pro vyhledávání: '"Francois-Xavier Musalem"'
Autor:
Francois-Xavier Musalem, Mark da Silva, Alexandra L. Rickard, Rhodri R. Davies, Mark Edward Mcnie, Gerold Schropfer
Publikováno v:
SPIE Proceedings.
Designing manufacturable MEMS devices requires a strong link between design and process engineers. Establishing systematic design principles through a common CAD framework facilitates this. A methodology for MEMS Design for Manufacturing (DFM) is pre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9db093a10d68cac00885d3c708c5be74
https://doi.org/10.1117/12.544971
https://doi.org/10.1117/12.544971
