Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Francois Weishbuch"'
Autor:
Andrey Lutich, Katherina Babich, Navneet Jain, Pritchard David, Piyush Verma, David M. Permana, Kai Sun, Tuhin Guha Neogi, Francois Weishbuch, Deepal Wehella-Gamage, Mahbub Rashed, Benoit Francois Claude Ramadout, Gowtham Vangara, Juhan Kim, Thomas Herrmann
Publikováno v:
SPIE Proceedings.
In this paper, we describe an integrated design space analysis approach consisting of full factorial layout generation, lithography simulations with added proximity effects, and rigorous statistical analysis through monte-carlo simulations which is u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f6919bf1e43cd1f7853232e10ac0be8
https://doi.org/10.1117/12.2258668
https://doi.org/10.1117/12.2258668
