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pro vyhledávání: '"Francine Abrego"'
Autor:
Francine Abrego, Heather C. Galloway, Deborah C. Koeck, Jeremy Jarl, Gary W. Beall, Suresh Murugesan
Publikováno v:
Polymer. 46:11889-11895
As integrated circuits have become more and more complex and with smaller and smaller feature sizes several limitations have become apparent. One of these is the need for low-k dielectric materials as insulating layers. Recent work has reported promi