On the co-integration of a thermo-resistive flow-rate sensor in a multi-parameter sensing chip for water network monitoring

Autor: Frederic Marty, Francesco Peressuti, Ferdous Shaun, Elyes Nefzaoui, Hugo Regina, Tarik Bourouina, Patrick Poulichet, Martine Capochichi-Gnambodoe, William Cesar, Sreyash Sarkar, Philippe Basset

Publikováno v: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017)
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. pp.1069-1072, ⟨10.1109/TRANSDUCERS.2017.7994237⟩

International audience; Motivated by the need for a multi-parameter sensing chip for water networks monitoring, we address here the specific case of a flow-rate sensor where the main challenge is the substrate material. Instead of using conventional

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7374c9100d8d7ea9da1b8a77df4fd788
https://hal.archives-ouvertes.fr/hal-01578963