Zobrazeno 1 - 10
of 52
pro vyhledávání: '"Francesco Cramarossa"'
Publikováno v:
Journal of Applied Physics. 61:2754-2762
Deposition and etching of thin plasma‐polymerized fluorinated monomers have been studied in discharges fed with C2F6‐H2 and C2F6‐O2 mixtures, respectively. A parallel plate reactor with thermostated electrodes has been utilized for the present
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::25846ccdf8ff8cb33e3988e19ef97531
https://doi.org/10.1063/1.337864
https://doi.org/10.1063/1.337864
Publikováno v:
Chemical Physics. 124:91-101
The CO dissociation of a 5% COHe radiofrequency discharge has been analyzed as a function of CO residence time in discharge, in a reactor cooled at liquid-nitrogen temperature. The gas phase products (CO 2 , O, C 2 ) as well as CO 2 trapped and ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::123c134610716a3cfb1ea33d3b8056e6
https://doi.org/10.1016/0301-0104(88)85085-7
https://doi.org/10.1016/0301-0104(88)85085-7
Publikováno v:
Journal of Applied Physics. 54:1284-1288
Some results obtained during the etching of Si or the deposition of fluorocarbon films over Si substrates uncoupled from ground in rf plasmas fed with CF4–H2, C2F6–H2, C3F8–H2 and CF4–C2F4 mixtures are presented. The polymerization process is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7531e45de9100d37283787aac2657023
https://doi.org/10.1063/1.332193
https://doi.org/10.1063/1.332193
Publikováno v:
Plasma Chemistry and Plasma Processing. 9:513-525
The etching of aluminum has been studied in a diode reactor fed with CCl4−Cl2 mixtures. The overall reaction has been found to be influenced by the contemporaneous deposition of low-volatile etch products and/or a chlorocarbon polymer film originat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f26379807aba2fd4f99c46f265cdb45a
https://doi.org/10.1007/bf01023917
https://doi.org/10.1007/bf01023917
Autor:
Claudine Gorse, Ph. Brechignac, S. De Benedictis, Francesco Cramarossa, Riccardo d'Agostino, Mario Capitelli
Publikováno v:
Optics Communications. 47:107-110
5% CO-He radiofrequency discharges have been theoretically and experimentally studied in a liq N 2 -cooled reactor operated at 6 torr as a function of the residence time. The discharges are characterized by CO dissociation rates higher than those obs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::50e115a397c4e5bb83d6d3ddc66032df
https://doi.org/10.1016/0030-4018(83)90096-2
https://doi.org/10.1016/0030-4018(83)90096-2
Publikováno v:
Plasma Chemistry and Plasma Processing. 4:1-14
Microscopic decomposition processes and gas-solid interactions in CnF2n+2-H2 and CF4-C2F4 discharges are studied by comparing mass-spectrometric results with actinometric emission diagnostics. The role played by CFx radicals is evident in the various
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed0c0d15eec5ea56718f9ee72bc04f99
https://doi.org/10.1007/bf00567367
https://doi.org/10.1007/bf00567367
Publikováno v:
Plasma Chemistry and Plasma Processing. 4:163-178
Radiofrequency discharges fed with CCl4-Cl2 mixtures have been studied in the pressure range 0.3 to 0.6 torr by means of emission spectroscopic actinometry with Ar, He, and N2 as actinometers. Two different reactors, a parallel plate and a capacitive
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d630b4de43c5773b75571d368cfe99d
https://doi.org/10.1007/bf00566839
https://doi.org/10.1007/bf00566839
Publikováno v:
Journal of Quantitative Spectroscopy and Radiative Transfer. 14:419-436
A vibro-rotational analysis has been performed of the second positive system (SPS) of N 2 and of the first negative system (FNS) of N + 2 emitted by 35 MHz discharges in flowing nitrogen operated at pressures of 5–50 torr and power densities of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::17ccd56796e3318c4e211d895319dffa
https://doi.org/10.1016/0022-4073(74)90046-6
https://doi.org/10.1016/0022-4073(74)90046-6
Publikováno v:
Journal of Physics D: Applied Physics. 18:413-423
Infrared and visible analysis of the emission produced by 4:1 He-CO mixtures with the addition of variable amounts of O2 has been used for a more comprehensive understanding of the processes involved in He-CO-O2 radiofrequency discharges. The effect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea0909b4cf03137cc1c2e6cd33478d73
https://doi.org/10.1088/0022-3727/18/3/010
https://doi.org/10.1088/0022-3727/18/3/010