Zobrazeno 1 - 1
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pro vyhledávání: '"François Atteia"'
Autor:
Gérard Berginc, David Duché, François Atteia, Jean-Jacques Simon, Ludovic Escoubas, Lou Denaix, Judikaël Le Rouzo
Publikováno v:
Materials Research Bulletin
Materials Research Bulletin, 2020, 131, ⟨10.1016/j.materresbull.2020.110973⟩
Materials Research Bulletin, 2020, 131, ⟨10.1016/j.materresbull.2020.110973⟩
International audience; Black Silicon (BS) nanostructures fabricated by Reactive Ion Etching at Room Temperature (RT-RIE) are presented. We discuss the influence of the plasma process parameters on the silicon etching and their influence on the shape
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::22d5a75e07ba6100a7f089a77d4f56f5
https://hal-amu.archives-ouvertes.fr/hal-03428248
https://hal-amu.archives-ouvertes.fr/hal-03428248
