Výsledky vyhledávání - "Fowler, Shelly"

Conference

Hybrid high refractive index polymer coatings.

Autor: Wang, Yubao, Flaim, Tony, Mercado, Ramil, Fowler, Shelly, Holmes, Douglas, Planje, Curtis

Publikováno v: Proceedings of SPIE; Nov2005, Issue 1, p42-49, 8p

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Conference

New materials for 193-nm bottom antireflective coatings.

Autor: Weimer, Marc, Krishnamurthy, Vandana, Fowler, Shelly, Nesbit, Cheryl, Claypool, James B.

Publikováno v: Proceedings of SPIE; Nov2003, Issue 1, p866-871, 6p

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Conference

Novel conformal organic antireflective coatings for advanced I-line lithography.

Autor: Deshpande, Shreeram V., Nowak, Kelly A., Fowler, Shelly, Williams, Paul, Arjona, Mikko

Publikováno v: Proceedings of SPIE; Nov2001, Issue 1, p855-863, 9p

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Conference

Sub-0.35-m i-line lithography with new advanced bottom antireflective coatings optimized for high-topography and dual-damascene applications.

Autor: Deshpande, Shreeram V., Brakensiek, Nickolas L., Williams, Paul, Nowak, Kelly A., Fowler, Shelly

Publikováno v: Proceedings of SPIE; Nov2001, Issue 1, p354-367, 14p

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