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Publikováno v:
Silicon Sensors and Actuators ISBN: 9783030801342
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf9b7ab6d065a4e5e48231884c2947f2
https://doi.org/10.1007/978-3-030-80135-9_28
https://doi.org/10.1007/978-3-030-80135-9_28
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the k