Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Filtvedt, J."'
32nd European Photovoltaic Solar Energy Conference and Exhibition; 1008-1010
A novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane is demonstrated. The method has been proven through a fir
A novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane is demonstrated. The method has been proven through a fir
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33b1e41ff98660caef54670c13e45fba
31st European Photovoltaic Solar Energy Conference and Exhibition; 284-287
Dynatec has earlier reported findings from a novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane. The results pre
Dynatec has earlier reported findings from a novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane. The results pre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98b689dbb5b7106e5a71275ff4866b31