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pro vyhledávání: '"Filippo M. Ferrari"'
Autor:
Alessandro Tocchio, Cristiano R. Marra, Francesco Rizzini, Filippo M. Ferrari, Giacomo Langfelder
Publikováno v:
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
This paper reports, to the authors' knowledge, the first MEMS accelerometer capable of modulating the acceleration signal from DC to AC frequencies: the geometry-modulated accelerometer. In this innovative scheme of operation, the geometry of the mov
Autor:
Giacomo Langfelder, Cristiano R. Marra, Filippo M. Ferrari, Francesco Rizzini, Alessandro Tocchio
Publikováno v:
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
The work presents principle of operation, design and test of a novel z-axis MEMS accelerometer realized through a single resonator, in which the differential readout is achieved sampling the two resonant frequency values obtained alternatively biasin