Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Filippo Belletti"'
Autor:
Izabela Saj, Seung Yoon Lee, Noh-Kyoung Park, Chan Hwang, Christian Marinus Leewis, Giulio Bottegal, Jan Jitse Venselaar, Sam Chen, Amy Wang, Tsiatmas Anagnostis, Giacomo Miceli, James Lee, Do-Haeng Lee, Filippo Belletti, Joon-Soo Park, Minseok Kang, Sabil Huda, Eun-Ji Yang, Jeongjin Lee
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
Utilizing a unique high NA optical system, a new methodology to measure device overlay accurately has been developed with a key differentiation. Historically, optical techniques to measure features below the image resolution require supporting measur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d8cc1086bd3add6ae39964660ce0686
https://doi.org/10.1117/12.2553446
https://doi.org/10.1117/12.2553446
Autor:
Milos Popadic, Wade Huang, R.K. Jaganatharaja, Isabel de la Fuente, Ward Tu, Hugo Augustinus Joseph Cramer, Elliott Mc Namara, Rik van Laarhoven, Sharon Hsu, Filippo Belletti
Publikováno v:
SPIE Proceedings.
The logic manufacturing process requires small in-device metrology targets to exploit the full dose correction potential of the modern scanners and process tools. A high-NA angular resolved scatterometer (YieldStar S-1250D) was modified to demonstrat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a5f13a4efb8896028aa8ff347080ea4d
https://doi.org/10.1117/12.2260268
https://doi.org/10.1117/12.2260268
Autor:
Moura Ribeiro, Núbia1 mrodriveira@gmail.com, Rodrigues de Oliveira, Marta Aparecida1 nubiamr.ifba@gmail.com, Santana Silva, Marcelo1 profmarceloifba@gmail.com
Publikováno v:
Redes (1414-7106). 2020 Special Issue, Vol. 25, p2592-2615. 24p.
Autor:
den Boef, Arie, Cramer, Hugo, Petra, Stefan, Fagginger Auer, Bastiaan Onne, Schmetz-Schagen, Jolanda, Koolen, Armand, van Loon, Olaf, de Gersem, Gudrun, Klandermans, Pieter, Bakker, Eric
Publikováno v:
Proceedings of SPIE; 8/13/2017, Vol. 10449, p1-8, 8p
Autor:
Fracarolli, Guilherme Silva1,2 (AUTHOR) guilherme.fracarolli@phd.iseg.ulisboa.pt
Publikováno v:
Economies. Jun2021, Vol. 9 Issue 2, p84-84. 1p.
Autor:
Adan, Ofer, Robinson, John C., Kang, Min-Seok, Hwang, Chan, Lee, Seungyoon, Lee, Jeongjin, Park, Joon-Soo, Leewis, Christian, Yang, Eun-Ji, Lee, Do-Haeng, Lee, James, Huda, Sabil, Park, Noh-Kyoung, Tsiatmas, Anagnostis, Bottegal, Giulio, Wang, Amy, Belletti, Filippo, Venselaar, Jan Jitse, Miceli, Giacomo, Saj, Izabela
Publikováno v:
Proceedings of SPIE; 1/23/2020, Vol. 11325, p1132529-1132529, 1p
Autor:
Ronan Le Velly
Produire, échanger et consommer autrement! Tel pourrait être le slogan du commerce équitable, de l'agriculture biologique ou des circuits courts de proximité, que la recherche nomme les'systèmes alimentaires alternatifs'. Dans la pratique qu'en
Autor:
Susanne Bauer, Christine Bischof, Stephan Gabriel Haufe, Stefan Beck (verst.), Leonore Scholze-Irrlitz
Was der (europäische) Mensch isst, wird heutzutage nicht zuletzt durch Wissenschaft, Technologie und Markt reguliert. Im Zuge einer »Verwissenschaftlichung« des Alltags sind Nahrung und Ernährung vielfältigen Standardisierungen unterworfen. Dies