Ateliers et Travaux Pratiques sur le thème des Capteurs pour l’Eau

Autor: Ferdous, Shaun, Nefzaoui, E., Marty, Frédéric, Erfan, Mazen, Mercier, Bruno, Couty, Magdalèna, Guo, Xiaofeng, Français, Olivier, Bourouina, Tarik

Publikováno v: 15ème Journée pédagogique du CNFM 2018
15ème Journée pédagogique du CNFM 2018, Nov 2018, St Malo, France

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______4325::967a2dcbd89d32d3f9d952e8cd60b8eb
https://hal.archives-ouvertes.fr/hal-02151552

Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates

Autor: Tarik Bourouina, Ferdous Shaun, Elyes Nefzaoui, William Cesar, Frederic Marty, Sreyash Sarkar, Patrick Poulichet

Publikováno v: Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering, IOP Publishing, 2018, 28 (7), ⟨10.1088/1361-6439/aab6bd⟩

International audience; We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimized under the following constraints: low power c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9543287f7d24cdf2271804bf3e90e6bf
http://arxiv.org/abs/1804.07524

On the co-integration of a thermo-resistive flow-rate sensor in a multi-parameter sensing chip for water network monitoring

Autor: Frederic Marty, Francesco Peressuti, Ferdous Shaun, Elyes Nefzaoui, Hugo Regina, Tarik Bourouina, Patrick Poulichet, Martine Capochichi-Gnambodoe, William Cesar, Sreyash Sarkar, Philippe Basset

Publikováno v: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017)
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. pp.1069-1072, ⟨10.1109/TRANSDUCERS.2017.7994237⟩

International audience; Motivated by the need for a multi-parameter sensing chip for water networks monitoring, we address here the specific case of a flow-rate sensor where the main challenge is the substrate material. Instead of using conventional

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7374c9100d8d7ea9da1b8a77df4fd788
https://hal.archives-ouvertes.fr/hal-01578963

Robust multi-parameter sensing probe for water monitoring based on ALD-coated metallic micro-patterns

Autor: Ferdous Shaun, Tarik Bourouina, Frederic Marty, William Cesar, Philippe Basset, Zhifei Xu, Bérengère Lebental, Martine Capo-Chichi, Massimo Pellegrino

Publikováno v: NEMS

We report on a multi-sensing probe for water network monitoring enabling simultaneous measurements of water electrical conductivity, flow-rate and temperature. A very simple fabrication process is used where all physical sensors are obtained only fro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2afeb509762032ed5b9939562aae69f0
https://doi.org/10.1109/nems.2016.7758263

Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption.

Autor: Shaun, Ferdous, Nefzaoui, Elyes, Marty, Frederic, Cesar, William, Bourouina, Tarik

Publikováno v: Microsystem Technologies; Jun2022, Vol. 28 Issue 6, p1357-1364, 8p