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pro vyhledávání: '"Ferdinand Rosas"'
Autor:
Mark Slezak, Ramil-Marcelo L. Mercado, Joyce Lowes, Jim D. Meador, Charlyn Stroud, Victor Pham, Ferdinand Rosas
Publikováno v:
SPIE Proceedings.
As the semiconductor industry approaches smaller and smaller features, applications that previously used top antireflective coatings have now begun using developer-soluble bottom anti-reflective coatings (BARCs). However, there are several drawbacks
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::045fefa0eae896151739ffc4b46fe40c
https://doi.org/10.1117/12.846608
https://doi.org/10.1117/12.846608
