Zobrazeno 1 - 10
of 43
pro vyhledávání: '"Fedorovich, O. A."'
Autor:
Hladkovskyi V. V., Fedorovich O. A.
Publikováno v:
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 4-5, Pp 40-44 (2017)
The article presents the research results on the influence of the amount of oxygen in a mixture with sulfur hexafluoride on the rate and anisotropy of the silicon etching in the plasma-chemical reactor with the controlled magnetic field. The etching
Externí odkaz:
https://doaj.org/article/13dd9ee241494fc0ae49bce848d34317
Publikováno v:
In Procedia - Social and Behavioral Sciences 16 January 2015 171:198-202
Publikováno v:
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 5-6, Pp 39-45 (2014)
The paper presents the research results on the device for obtaining diamond-like films from gas phase, constructed and tested in the Institute for Nuclear Research of the National Academy of Sciences. The device is based on a high-frequency (HF) disc
Externí odkaz:
https://doaj.org/article/e1abf0dee34249abb723e6f4668db9bc
Autor:
Maksimenko L. S., Mishchuk O. N., Matyash I. E., Serdega B. K., Kostin E. G., Polozov B. P., Fedorovich O. A., Savinkov G. K.
Publikováno v:
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 1, Pp 3-8 (2013)
This article presents research results on diamond-like films produced under different technological conditions. The parameter ρ — polarization difference — has been introduced. It has been found from spectral features of the parameter ρ that th
Externí odkaz:
https://doaj.org/article/008ce29134a445b59a9bfa47561792e9
Publikováno v:
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 6, Pp 46-49 (2009)
Results of technological researches of plasmachemical reactor (PCR) for etching of silicon plate edges of photo-electric converters are described. Dependences of silicon etching speed on a discharge current, magnetic field intensity, quantity of the
Externí odkaz:
https://doaj.org/article/816723ad18d748549bd0d7d22465256b
Autor:
Hladkovskiy, V. V., Fedorovich, O. A.
Publikováno v:
Ukrainian Journal of Physics; Vol. 62 No. 3 (2017); 208
Український фізичний журнал; Том 62 № 3 (2017); 208
Український фізичний журнал; Том 62 № 3 (2017); 208
The results of experimental researched dealing with the bias voltage influence on the evolution of spectra emitted by plasma at the etching of gallium nitride in a plasma-chemical reactor with the controlled magnetic field are reported. At high bias
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=issn20710194::3d554bab91e9b11543b2cf45c9305afd
https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018698
https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018698
Autor:
Fedorovich, O.1 oafedorovich@kinr.kiev.ua
Publikováno v:
High Temperature. Jul2014, Vol. 52 Issue 4, p501-510. 10p.
Publikováno v:
Scopus-Elsevier
The peculiarities of self-bias voltage formation in plasma-chemical reactors (PCR) with controlled magnetic fields have been investigated. The dependences of self-bias voltages on the values and configurations of magnetic fields in PCR, as well as, o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::d3400c7e31e94e47fb09372d77f0255b
http://dspace.nbuv.gov.ua/handle/123456789/82118
http://dspace.nbuv.gov.ua/handle/123456789/82118
Metal micro-detectors: development of 'transparent' position sensitive detector for beam diagnostics
Metal Micro-strip Detector (MMD) represents a novel position sensitive detector for wide range of applications. The main advantages of MMD are low thickness, high radiation resistance and high spatial resolution. MMD production technology includes so
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______1456::5f7091ddf69545e6562014641d5999e5
http://dspace.nbuv.gov.ua/handle/123456789/109208
http://dspace.nbuv.gov.ua/handle/123456789/109208
Autor:
Chernyak, V. Y., Sidoruk, S. M., Yukhymenko, V. V., Marchuk, V. E., Martysh, E. V., Fedorovich, O. A., Andryuschenko, V. O.
Publikováno v:
Scopus-Elsevier
The results of acoustic signals generation by two consistent dischargers of microsecond duration in a cylindrical liquid system are presented. The radius/height ratio of the cylinder, made of stainless steel, is ~ 13.5. Both discharges occur between
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::b0e8f02548526b3ed29b9c6c7daaba3b
http://dspace.nbuv.gov.ua/handle/123456789/109217
http://dspace.nbuv.gov.ua/handle/123456789/109217