Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Fedor Coopmans"'
Autor:
Bruno Roland, Fedor Coopmans
Publikováno v:
SPIE Proceedings.
We report on the impact of the use of the DESIRE system in optical lithography. Results obtained with first and second generation resists are compared with the performance of the DESIRE system. This comparative study was done for scanning projection,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e1f3bde5a4b1128d7b1bdfff47f0f0b
https://doi.org/10.1117/12.963730
https://doi.org/10.1117/12.963730
Autor:
Bruno Roland, Fedor Coopmans
Publikováno v:
Advances in Resist Technology and Processing III.
We introduce the DESIRE system, a noval approach to dry developed resist systems. DESIRE is a single layer system based on selective silylation. The optical spatial information is translated into silicon being built into the resin during the silylati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f8e620c5e12925a116744a6f91aeee3
https://doi.org/10.1117/12.963623
https://doi.org/10.1117/12.963623
Autor:
Fedor Coopmans, Paul Buysse
Publikováno v:
SPIE Proceedings.
In an effort to learn more about the nature and distribution in size of particles encountered in device fabrication, we have studied the non destructive inspection performance obtained with standard and low voltage scanning electron microscopes. To s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5dbe4a1a8f367eb6458e01799e42f3b
https://doi.org/10.1117/12.968353
https://doi.org/10.1117/12.968353