Zobrazeno 1 - 10
of 57
pro vyhledávání: '"Fedor A. Kuznetsov"'
Publikováno v:
Inorganic Materials. 51:897-902
SiC x N y :H films have been grown by inductively coupled plasma chemical vapor deposition via hexamethyldisilazane decomposition at substrate temperatures from 50 to 450°C and rf powers from 100 to 500 W. The growth rate and physicochemical propert
Autor:
Fedor A. Kuznetsov, Yurii M. Rumyantsev, V. S. Sulyaeva, Viktor V. Kirienko, Marina Kosinova, V. G. Kesler
Publikováno v:
Thin Solid Films. 558:112-117
Thin BCxNy films have been obtained by plasma enhanced chemical vapor deposition using N-trimethylborazine as a precursor. The films were deposited on Si(100) and fused silica substrates. The grown films were characterized by ellipsometry, Fourier tr
Publikováno v:
Inorganic Materials. 50:107-112
Low-pressure (1.33 and 13.3 Pa) chemical vapor deposition (CVD) of GeCx from tetraethylger-manium + hydrogen mixtures has been analyzed in a wide range of deposition temperatures, 300–1300 K, using thermodynamic modeling. In low-pressure CVD proces
Publikováno v:
Russian Microelectronics. 42:439-447
Processes of chemical vapor deposition (CVD) of metal and dielectric (high-k and low-k) films with the help of unconventional initial reagents (volatile complex and organoelement compounds) were developed. Complex investigation of the chemical and ph
Publikováno v:
Surface and Coatings Technology. 230:145-151
Thin films of boron carbonitride BC x N y were synthesized by plasma enhanced chemical vapor deposition using N-triethylborazine as a B-C-N-forming single source precursor. In this work, we investigated the effect of additional gases and temperature
Autor:
V. G. Kesler, A. N. Golubenko, Fedor A. Kuznetsov, B. M. Ayupov, N. I. Fainer, E. A. Maximovskii, Yu. M. Rumyantsev
Publikováno v:
Glass Physics and Chemistry. 39:77-88
Films of silicon carbonitride have been obtained by the plasma chemical decomposition of a gaseous mixture of helium and a volatile organic silicon compound 1,1,3,3-tetramethyldisilazane (TMDS) in the temperature range of 373–973 K. The modeling of
Autor:
Fedor A. Kuznetsov, M. M. Mazur, Anatoly Pavlyuk, L.I. Mazur, V. I. Pustovoit, D. Yu. Velikovskii, Vitold Pozhar
Publikováno v:
Acoustical Physics. 58:658-665
The complete elastic modulus matrix of a KY(WO4)2 single crystal has been determined for the first time using sound velocities measured in different directions of the crystal by a pulse-echo method. We have studied the entire isotropic part of the el
Publikováno v:
Inorganic Materials. 48:691-694
Low-pressure (13.3 and 1.33 Pa) chemical vapor deposition in the B-C-N-H and B-C-N-H-O systems from N-trimethylborazine + ammonia mixtures has been analyzed in a wide range of deposition temperatures, 300–1300 K, using thermodynamic modeling. The r
Autor:
Burkhard Beckhoff, Olaf Baake, Beatrix Pollakowski, Andreas Klein, Fedor A. Kuznetsov, Marina Kosinova, V. S. Sulyaeva, Peter Hoffmann, V. A. Trunova, Wolfgang Ensinger
Publikováno v:
X-Ray Spectrometry. 41:240-246
BCxNy films were produced from single-source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with
Autor:
Fedor A. Kuznetsov, M. G. Voronkov, A. V. Lis, A. O. Kolontaeva, L. D. Nikulina, Marina Kosinova, Sergey V. Sysoev, V. I. Rakhlin
Publikováno v:
Glass Physics and Chemistry. 38:8-14
The characterization of bis(trimethylsilyl)ethylamine was carried out using a combination of IR, UV, 1H, 13C, 29Si, and 15N NMR spectroscopy, as well as elemental analysis. The spectral characteristics of the compound were determined. The temperature