Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Fazel Parsapourkolour"'
Autor:
Ken Haffner, Vladimir Pashchenko, Fazel Parsapourkolour, Ramin Matloub, Sylvain Ballandras, Paul Muralt
Publikováno v:
2016 IEEE International Ultrasonics Symposium (IUS).
A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdb8d1e6df4dca860bd5bc59b000cc33
https://doi.org/10.1109/ultsym.2016.7728649
https://doi.org/10.1109/ultsym.2016.7728649
