Characterization of metrology to device overlay offset and novel methods to minimize it

Autor: Arie Jeffrey Den Boef, Justin Huang, Jeff Lin, Frank Sun, Matthew McLaren, Edison Wang, Farzad Farhadzadeh, Momo Lin, Kaustuve Bhattacharyya, Wilson Liu, Jason Hung, Marc Noot, Benny Gosali, Ken Chang, Cathy Wang, Sax Liao, Simon Gijsbert Josephus Mathijssen

Publikováno v: Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.

An after etch overlay measurement on device is typically used as a reference overlay as this is what determines the final overlay. The delta between on target overlay from after develop (ADI) and this reference overlay on device after etch (AEI) is k

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8981325562d805f21c4d5d02db2a3ad5
https://doi.org/10.1117/12.2583861

Taking the multi-wavelength DBO to the next level of accuracy and robustness

Autor: Se-Ra Jeon, Chan Hwang, Jeongijn Lee, Arie Jeffrey Den Boef, Seung-Bin Yang, Woo-young Jung, Seung Yoon Lee, Farzad Farhadzadeh, Simon Gijsbert Josephus Mathijssen, Daniel Park, Jinsun Kim, Won-Jae Jang, Joon-Soo Park, Marc Noot, Kaustubh Padhye, Oh-Sung Kwon, Kaustuve Bhattacharyya

Publikováno v: Metrology, Inspection, and Process Control for Microlithography XXXIV.

In multi patterning processes, overlay is now entangled with CD including OPC and stochastics. This combined effect is a serious challenge for continued shrink and is driving down the allowed overlay margin to an unprecedented level. We need to do ev

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2e808e901e4b35035acb96b03435966a
https://doi.org/10.1117/12.2551676

Performance Analysis of Content-Based Identification Using Constrained List-Based Decoding

Autor: Sviatoslav Voloshynovskiy, Oleksiy Koval, Farzad Farhadzadeh

Publikováno v: IEEE Transactions on Information Forensics and Security, 7(5), 1652-1667. Institute of Electrical and Electronics Engineers

This paper is dedicated to the performance analysis of content-based identification using binary fingerprints and constrained list-based decoding. We formulate content-based identification as a multiple hypothesis test and develop analytical models o

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2ba1f3f1f39b53f2103f5a04a8ab9ed3
https://doi.org/10.1109/tifs.2012.2206026

On accuracy, robustness, and security of bag-of-word search systems

Autor: Dimche Kostadinov, Farzad Farhadzadeh, Taras Holotyak, Maurits Diephuis, Svyatoslav Voloshynovskiy

Publikováno v: Media Watermarking, Security, and Forensics

In this paper, we present a statistical framework for the analysis of the performance of Bag-of-Words (BOW) systems. The paper aims at establishing a better understanding of the impact of different elements of BOW systems such as the robustness of de

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6cc68353ad1f3dce86693bbdeec869d2
https://doi.org/10.1117/12.2038149

Active content fingerprinting : shrinkage and lattice based modulations

Autor: Taras Holotyak, Sviatoslav Voloshynovskiy, Fokko Beekhof, Farzad Farhadzadeh

Publikováno v: 2013 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP) pp. 3073-3077
ICASSP
2013 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP), 3073-3077
STARTPAGE=3073;ENDPAGE=3077;TITLE=2013 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP)

In this paper, we extend a new framework introduced as active content fingerprinting in [1] 1 that takes the best from the two worlds of content fingerprinting and digital watermarking to overcome some of the fundamental restrictions of these techniq

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5c0ca0c1b9211b403c1716155dd53e21
https://research.tue.nl/en/publications/36b68d06-eedf-4d7c-bd88-1f0475a01536