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pro vyhledávání: '"Farukh Yasin"'
Autor:
S. H. Sharifi, Stefan Cosemans, R. Carpenter, D. Crotti, Shreya Kundu, N. Jossart, Sebastien Couet, Barry O'Sullivan, Farukh Yasin, Siddharth Rao, Woojin Kim, Simon Van Beek, Gouri Sankar Kar
Publikováno v:
IRPS
To enable high density STT-MRAM, process-induced damage needs to be minimized. High temperature anneals and patterning can degrade performance and reliability. By employing a novel patterning scheme, involving physical ion beam etch, etchback and oxi