Detection and Prevention of Palladium Contamination in Silicon Devices

Autor: Polignano, Maria Luisa, Mica, Isabella, Brambilla, Agostino, Brambilla, Claudio, Brambilla, Simona, Ceresoli, Monica, Codegoni, Davide, Farini, Laura, Somaini, Francesco

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; October 2015, Vol. 242 Issue: 1 p252-257, 6p