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Autor:
Stanley, Kevin G, Czyzewska, Eva K, Vanderhoek, Tom P K, Fan, Lilian L Y, Abel, Keith A, Wu, Q M Jonathan, Parameswaran, M (Ash)
Publikováno v:
Journal of Micromechanics and Microengineering; October 2005, Vol. 15 Issue: 10 p1979-1987, 9p
