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pro vyhledávání: '"Fabrizio Pennella"'
Publikováno v:
2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Surface photo voltage (SPV) measurement has become an important semiconductor characterization tool due to the availability of commercial equipment and its non-contact nature. In this study, we discuss the application of the SPV technique for the con
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c9161a9002d325a468d1982be723e522
https://doi.org/10.1109/asmc.2007.375116
https://doi.org/10.1109/asmc.2007.375116
