Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Fabrication of MEMS and NEMS devices"'
Autor:
Jung‐Hung Wen, Weileum Fang
Publikováno v:
Micro & Nano Letters, Vol 16, Iss 12, Pp 567-572 (2021)
Abstract This work proposed a pure‐metal, single‐proof‐mass structure fabricated by the standard 0.18 μm one‐poly‐silicon six‐metal (1P6M) CMOS process along with one in‐house post‐CMOS wet‐etching approach. The implemented state
Externí odkaz:
https://doaj.org/article/be6a1459277f42ae8d112af06ad2ff7e
Autor:
Rakesh Tirupathi, Sougata Kumar Kar
Publikováno v:
IET Science, Measurement & Technology, Vol 15, Iss 3, Pp 279-291 (2021)
Abstract This paper presents two simple but effective switched capacitor based differential output capacitive sensor interfaces, designed and fabricated in United Microelectronics Corporation 180 nm complementary metal oxide semiconductor (CMOS) proc
Externí odkaz:
https://doaj.org/article/999d579734284c4ab58adfc003156628
Autor:
Shashi Kumar, Gaddiella Diengdoh Ropmay, Pradeep Kumar Rathore, Peesapati Rangababu, Jamil Akhtar
Publikováno v:
IET Science, Measurement & Technology, Vol 15, Iss 3, Pp 268-278 (2021)
Abstract This paper presents a novel dual current mirror based CMOS circuit for design and development of highly sensitive CMOS‐MEMS integrated pressure sensors. The proposed pressure sensing structure has been designed using piezoresistive effect
Externí odkaz:
https://doaj.org/article/f3b3b697487b4f6ebf15ab13be4089dd
Publikováno v:
Micro & Nano Letters, Vol 16, Iss 5, Pp 281-289 (2021)
Abstract Due to the constraints of actual conditions, large‐scale research and analysis of micropumps are difficult to achieve. In this paper, the micropump is divided into a vibrating part and a flowing part through a similar theory research metho
Externí odkaz:
https://doaj.org/article/a3af90a1fbc942a5a5083c1b5b5051dd
Publikováno v:
Electronics Letters, Vol 57, Iss 1, Pp 22-24 (2021)
Abstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes duri
Externí odkaz:
https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be
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