Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors

Autor: Cecile Floer, Fabien Benedic, Sergei Zhgoon, Abdelkrim Talbi, Olivier Bou Matar, Florian Bartoli, Thierry Aubert, Mohammed Moutaouekkil, Harshad Mishra, Stefan McMurtry, Sami Hage-Ali, Omar Elmazria, Damia Dekkar, Benoit Baudrillart

Publikováno v: IEEE Sensors
IEEE Sensors, Oct 2017, Glasgow, United Kingdom. ⟨10.1109/ICSENS.2017.8234393⟩
IEEE Sensors, Oct 2017, Glasgow, United Kingdom

International audience; —This paper studies the Diamond/ZnO/LiNbO3 structure, numerically and experimentally, as a candidate for a packageless sensor based on the surface acoustic wave technology. The structure is compared with an AlN/ZnO/LiNbO3 st

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::da8c9d674ad936e04b96aef8d80f1922
https://hal.science/hal-01628938/file/WLAW.pdf