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pro vyhledávání: '"Fabian Wilbers"'
Autor:
C. Lorant, John Newby, Gerhard Bast, Fabian Wilbers, Vignesh Sundar, Frank Holsteyns, Kay Wendt, Jochen Ruth
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The continued drive in the semiconductor industry for smaller, faster and cheaper integrated circuits has driven the industry to the 10nm technology node and beyond and ushered in a new era of high-performance 3-dimensional transistor structures. Con
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad09c94ee598a077a9dbc8e1bb9af4e6
https://doi.org/10.1109/asmc.2018.8373202
https://doi.org/10.1109/asmc.2018.8373202
