Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Fabian C. Martinez"'
Autor:
Aaron J. Knobloch, Fabian C. Martinez, Dorian Liepmann, Kelvin Fu, Matt Senesky, A. Carlos Fernandez-Pello, Conrad R. Stoldt, Albert P. Pisano, Roya Maboudian, David C. Walther, Seth R. Sanders
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 123:326-330
This work presents a project overview and recent research results for the MEMS Rotary Engine Power System project at the Berkeley Sensor & Actuator Center of the University of California at Berkeley. The research motivation for the project is the hig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b11f1de48efcdb37957750d22771ae0b
https://doi.org/10.1541/ieejsmas.123.326
https://doi.org/10.1541/ieejsmas.123.326
Publikováno v:
SPIE Proceedings.
For Extreme Ultra-violet Lithography (EUVL) targeting at 11nm and beyond design rules, the minimum printable EUVL multilayer (ML) mask defect size can be as small as 20-25nm. As a result, the defect-free EUVL ML mask blank fabrication remains the top
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::670c3329fbb4a32b5558332d1eb0a320
https://doi.org/10.1117/12.927018
https://doi.org/10.1117/12.927018
Autor:
Sanjay Goyal, Michael L. Leeson, Manish Chandhok, Jan Hermans, Steven L. Carson, Marilyn Kamna, Seh-Jin Park, Guojing Zhang, Tod A. Laursen, Alan Myers, Alan R. Stivers, Sanjay Govindjee, Gian Lorusso, Gerd Brandstetter, Eric Hendrickx, Fabian C. Martinez
Publikováno v:
Alternative Lithographic Technologies.
EUV blank non-flatness results in both out of plane distortion (OPD) and in-plane distortion (IPD) [3-5]. Even for extremely flat masks (~50 nm peak to valley (PV)), the overlay error is estimated to be greater than the allocation in the overlay budg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::047f392a3a1419ed816bce5f4cda69ec
https://doi.org/10.1117/12.814428
https://doi.org/10.1117/12.814428
Autor:
Nathan Wilcox, Chuan Hu, Seh-Jin Park, Guojing Zhang, Marilyn Kamna, Kamgmin Hsia, Fabian C. Martinez, Chandhok Manish, Alan R. Stivers
Publikováno v:
Photomask Technology 2008.
Extreme Ultraviolet Lithography (EUVL) masks have residual stress induced by several thin films on low thermal expansion material (LTEM) substrates. The stressed thin films finally result in convex out-of-plane displacement (OPD) of several 100s of n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::938b1c8ff3369af7d62b872118fb9423
https://doi.org/10.1117/12.801542
https://doi.org/10.1117/12.801542
Publikováno v:
Microelectromechanical Systems.
Design, modeling, and analysis of a novel in-plane cantilever apex seal for maintaining high compression ratios in a MEMS-based rotary internal combustion engine are presented. This work is part of an effort to create a portable, MEMS-based Rotary En
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::270f8f2600ba0c45dafd412ee29ad920
https://doi.org/10.1115/imece2003-42071
https://doi.org/10.1115/imece2003-42071
Autor:
David C. Walther, Kelvin Fu, Fabian C. Martinez, Carlos Fernandez-Pello, Dorian Liepmann, Albert P. Pisano, Aaron J. Knobloch
Publikováno v:
Advanced Energy Systems.
Design and fabrication of a Silicon-based MEMS rotary engine are discussed in this paper. This work is part of an effort currently underway to develop a portable, autonomous power generation system potentially capable of having an order of magnitude
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0e0a230c00e9bd506b95e710a2d9c64b
https://doi.org/10.1115/imece2001/aes-23636
https://doi.org/10.1115/imece2001/aes-23636
Autor:
David C. Walther, Aaron J. Knobloch, Dorian Liepmann, Carlos Fernandez-Pello, Albert P. Pisano, Fabian C. Martinez, Kaoru Maruta, Kenji Miyaska, Kelvin Fu
Publikováno v:
Micro-Electro-Mechanical Systems (MEMS).
A research project is currently underway to develop small-scale internal combustion engines fueled by liquid hydrocarbons. The ultimate goal of the MEMS Rotary Internal Combustion Engine Project is to develop a liquid hydrocarbon fueled MEMS-size rot
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::660e773e7307f4f18550d9cffdc0445a
https://doi.org/10.1115/imece2001/mems-23924
https://doi.org/10.1115/imece2001/mems-23924