Low temperature silicidation of Pd layers on crystalline silicon monitored via in situ resistance measurements

Autor: Faber, Erik J., Wolters, Rob A.M., Rajasekharan, Bijoy, Salm, Cora, Schmitz, Jurriaan, Edelstein, Daniel C., Schulz, Stefan E.

Publikováno v: Advanced Metallization Conference 2009: proceedings of the conference held September 13-15, 2009, Baltimore, Maryland, U.S.A, 133-140
STARTPAGE=133;ENDPAGE=140;TITLE=Advanced Metallization Conference 2009

Metal-silicon contacts may degrade during (SOI) wafer processing at unknown, high temperature conditions such as caused by sputtering or etching. We observed this phenomenon for Pd contacts on SOI wafers. Suicide formation of Pd contacts on crystalli

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https://research.utwente.nl/en/publications/221949dc-9f39-46a3-82d0-3b352fc68541

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Si-C linked organic monolayers on crystalline silicon surfaces as alternative gate insulators.

Autor: Faber EJ; BIOS, Lab-on-a-Chip Group, MESA+Research Institute, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands., de Smet LC, Olthuis W, Zuilhof H, Sudhölter EJ, Bergveld P, van den Berg A

Publikováno v: Chemphyschem : a European journal of chemical physics and physical chemistry [Chemphyschem] 2005 Oct 14; Vol. 6 (10), pp. 2153-66.