Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Fa Yen Cheng"'
Publikováno v:
Microelectronic Engineering. 201:16-21
In this study, 0.18 um pitch processed CMOS ICs with multiple thin film layers manufactured by United Microelectronics Corporation were used for the measurement of the surface deformation from the Scanning Electron Microscopy (SEM) images and Digital
Publikováno v:
Advancements in Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 3 ISBN: 9783030300081
For accurate measurement, phase-shifting technique is usually adopted to the shadow moire measurement system. Accurately introducing the amount of phase shift is required in order to extract the phase properly. However, the specimen or system may be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f76b3fc03661d8cecb5e11decbc0aa7
https://doi.org/10.1007/978-3-030-30009-8_15
https://doi.org/10.1007/978-3-030-30009-8_15
Publikováno v:
Advancement of Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 3 ISBN: 9783319974804
This work demonstrates a technique to measure the residual stress of thin films that involves a combination of focused ion beam (FIB) milling, SEM imaging and digital image correlation (DIC) analysis. Use focused ion beam (FIB) to surface milling dif
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4fabc134d03f7c1b002a57ddf5e5ac5a
https://doi.org/10.1007/978-3-319-97481-1_15
https://doi.org/10.1007/978-3-319-97481-1_15
Publikováno v:
The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics. 2019:1008A1115