Zobrazeno 1 - 1
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pro vyhledávání: '"F. Najimabadi"'
Publikováno v:
SPIE Proceedings.
We present efforts to mitigate debris from laser-produced Sn plasma by introducing a low energy pre-pulse while keeping high in-band conversion efficiency from laser to 13.5 nm extreme ultraviolet (EUV) light. The basic idea is to separate the proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::755b012612fc3682a1de03c4342e181d
https://doi.org/10.1117/12.725806
https://doi.org/10.1117/12.725806
