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Autor:
J. C. Royer, Laurent-Luc Chapelon, Daniel Barbier, F. Naudin, D. Neira, J. Vitiello, J. Clerico, Joaquim Torres, P. Mukundhan, Guray Tas
Publikováno v:
Microelectronic Engineering. 83:2346-2350
Young's modulus, which is a measure of elastic strength, provides a good predictor of an interlevel dielectric (ILD) film's ability to withstand chemical mechanical polishing (CMP) and packaging stresses. Picosecond ultrasonics offers a high-throughp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52075ad9dfa2d1228267c7d1126f760e
https://doi.org/10.1016/j.mee.2006.10.033
https://doi.org/10.1016/j.mee.2006.10.033
Autor:
A. Chene, Antoine Magnan, S. Dirou, F. Naudin, A. Delbove, A. Cavailles, C. Bry, M. Robert, L. Cellerin
Publikováno v:
Revue des Maladies Respiratoires. 33:A7-A8
Introduction La fibroscopie bronchique est un examen generalement mal tolere. La Societe de pneumologie de langue francaise suggere l’utilisation d’une premedication en amont de la fibroscopie, mais les pratiques quant a l’utilisation d’une s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5d60825489cf6bb1bda39e5e829584f
https://doi.org/10.1016/j.rmr.2015.10.018
https://doi.org/10.1016/j.rmr.2015.10.018
Publikováno v:
Key Engineering Materials. :559-562
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59fb834a1118c9c9537294708c3aabab
https://doi.org/10.4028/www.scientific.net/kem.206-213.559
https://doi.org/10.4028/www.scientific.net/kem.206-213.559
Publikováno v:
Le Journal de Physique IV. 11:Pr3-771
In a large scale plasma reactor, a high microwave power of 1600 W is necessary to obtain a homogeneous distribution of the plasma source. The increase of the microwave power allows to decrease the substrate temperature during the process (150°C) wit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::24ef12ed46fbebfe8aa4662c38eeb6de
https://doi.org/10.1051/jp4:2001397
https://doi.org/10.1051/jp4:2001397
Publikováno v:
Le Journal de Physique IV. :Pr8-819
Previous works have described the deposition conditions of silicon oxide by Remote Microwave Plasma Enhanced Chemical Vapor Deposition. In this paper, the size of the quartz tube containing the glow discharge has been changed (O=255 mm instead of 30
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69d4cf9bce4b287676fce4547861418d
https://doi.org/10.1051/jp4:19998104
https://doi.org/10.1051/jp4:19998104
Publikováno v:
Le Journal de Physique IV. :Pr8-141
Silicon oxide is deposited by Remote Microwave Plasma Enhanced Chemical Vapor Deposition (RMPECVD) using an oxygen plasma and a mixture of 5% silane in argon injected in the afterglow. Silica is used for applications such as protective and insulating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f871e7c598576c8ea41ed0fb5732cfb
https://doi.org/10.1051/jp4:1999817
https://doi.org/10.1051/jp4:1999817
Autor:
M. Vincent, F. Naudin, I. Archambeaud, M. Lefebvre, M. Lecouffe, Christian Agard, J. Connault, B. Gaborit, Thierry Ponge
Publikováno v:
La Revue de Médecine Interne. 32:S189-S190
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1df5556978c6c3ac155214f4023a93f3
https://doi.org/10.1016/j.revmed.2011.03.328
https://doi.org/10.1016/j.revmed.2011.03.328
Publikováno v:
Pathologie-biologie. 45(1)
Comparative study of twenty two strains of Escherichia coli producing a well-characterized penicillinase of the OXA type (oxacillinase) or of the IRT type (TEM resistant to inhibitors) evidenced different criteria leading to the distinction of two gr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::3f52029d468b9e2c820de7bb6ab7c02c
https://pubmed.ncbi.nlm.nih.gov/9097844
https://pubmed.ncbi.nlm.nih.gov/9097844
Publikováno v:
Revue des Maladies Respiratoires. 28:1194
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b2549dd8639389ab94b15d46f018d4a
https://doi.org/10.1016/j.rmr.2011.09.012
https://doi.org/10.1016/j.rmr.2011.09.012