Deep multilevel wet etching of fused silica glass microstructures in BOE solution.

Autor: Konstantinova TG; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Andronic MM; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Baklykov DA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Stukalova VE; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Ezenkova DA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Zikiy EV; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Bashinova MV; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Solovev AA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Lotkov ES; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia., Ryzhikov IA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia., Rodionov IA; FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia. irodionov@bmstu.ru.; Dukhov Automatics Research Institute, VNIIA, Moscow, 127030, Russia. irodionov@bmstu.ru.

Publikováno v: Scientific reports [Sci Rep] 2023 Mar 30; Vol. 13 (1), pp. 5228. Date of Electronic Publication: 2023 Mar 30.

Optical hydrogen sensing with high-Q guided-mode resonance of Al 2 O 3 /WO 3 /Pd nanostructure.

Autor: Kulikova DP; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; Faculty of Physics, Lomonosov Moscow State University, Moscow, Russia., Sgibnev YM; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia., Yankovskii GM; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia., Chubchev ED; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia., Lotkov ES; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; FMN Laboratory, Bauman Moscow State Technical University, Moscow, Russia., Ezenkova DA; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; FMN Laboratory, Bauman Moscow State Technical University, Moscow, Russia., Dobronosova AA; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; FMN Laboratory, Bauman Moscow State Technical University, Moscow, Russia., Baburin AS; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; FMN Laboratory, Bauman Moscow State Technical University, Moscow, Russia., Rodionov IA; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; FMN Laboratory, Bauman Moscow State Technical University, Moscow, Russia., Nechepurenko IA; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia.; Kotelnikov Institute of Radioengineering and Electronics RAS, Moscow, Russia.; Moscow Institute of Physics and Technology, Dolgoprudny, Moscow, Russia., Baryshev AV; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia., Dorofeenko AV; Dukhov Research Institute of Automatics (VNIIA), Moscow, Russia. adorofeenko@itae.ru.; Moscow Institute of Physics and Technology, Dolgoprudny, Moscow, Russia. adorofeenko@itae.ru.; Institute for Theoretical and Applied Electromagnetics RAS, Moscow, Russia. adorofeenko@itae.ru.

Publikováno v: Scientific reports [Sci Rep] 2023 Jan 17; Vol. 13 (1), pp. 890. Date of Electronic Publication: 2023 Jan 17.