Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Ezekiel Kruglick"'
Publikováno v:
Journal of Microelectromechanical Systems. 8:264-271
A lateral switching relay structure has been developed which provides a double gold contact with as low as 70-m/spl Omega/ measured contact resistance, 0.45-A current-carrying ability at MEMS compatible force levels, TTL compatible actuation, and air
Publikováno v:
Journal of Microelectromechanical Systems. 5:10-17
A class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed. Rigid links, mechanical couplings, and large-force, large-displacem
Publikováno v:
Proceedings IEEE Micro Electro Mechanical Systems. 1995.
Aluminum hinges and polysilicon piezoresistors have been fabricated in a standard commercial CMOS process with one maskless post-processing step. The hinges and piezoresistors are formed using the metal interconnect and transistor gate layers in the
Publikováno v:
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
We propose to create a class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram. We have created rigid links, mechanical couplings, and larg
Autor:
J. Ward, S. Patra, Ezekiel Kruglick, M. Harisson, Daniel J. Reiley, A. Sharma, J. Hirshkoff, Li Fan, C. Vacar, A. Husain, A. Oviedo, S. Gutierrez, V. Fedoriouk, J. Le, B.H. Heppner, P. Keegan, C. King, J. Gritters, P. De Dobbelaere, O. Gumuz, M. Harburn, Richard T. Chen, D. Vacar, J. Ford, C. Tran, T. Yeh, D. Rines, D. Ferrel, S. Gloeckner, A. Belenky, S. O'Connor, H.-J. Schmidtke, Y. Loke, Philippe J. Marchand
Publikováno v:
Optical Fiber Communication Conference and Exhibit.
The MEMS based fiber optical switch matrix is clearly an advanced technology for medium and large port-count optical cross-connects in optical networks. Regarding expandability, performance (as integration, insertion loss, polarization dependence los
Autor:
Ezekiel Kruglick, Daniel J. Reiley, C. King, P.D. Dobblelaere, S. Patra, Li Fan, S. Gloeckner, Richard T. Chen, S. Gutierrez, T. Yeh, M. Harburn, Anis Husain, J. Gritters, Ming C. Wu, Y. Loke
Publikováno v:
Optical Fiber Communication Conference and Exhibit.
In conclusion we have demonstrated fully nonblocking 16/spl times/16 switches in a single chip solution using MEMS fabricated by a surface micro-machining. We have shown how the critical mechanical elements of the MEMS-cell have been chosen to achiev
Autor:
J.A. Podosek, Thomas W. Kenny, L.M. Miller, Ezekiel Kruglick, William J. Kaiser, J.A. Kovacich
Publikováno v:
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
In this paper, a working prototype of a /spl mu/-magnetometer based on electron tunneling is described. The tunneling /spl mu/-magnetometer offers a unique combination of advantages including high resolution (/spl sim/10/sup -9/ Tesla//spl radic/Hz),
Publikováno v:
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176).
Design, fabrication, and testing of multi-axis CMOS piezoresistive accelerometers is described. Vertical axis accelerometers have been fabricated in multiple processes using a production tested maskless bulk etch step. Horizontal axis accelerometers
Autor:
David T. Chang, H. Marcy, R. Mukai, Gregory J. Pottie, Tsung-Hsien Lin, H. Sanchez, James G. Ho, Scott Valoff, M. Dong, Kristofer S. J. Pister, Ezekiel Kruglick, Oscar M. Stafsudd, G. Yung, Phyllis R. Nelson, A. Burstein, G. Asada, William J. Kaiser, Felice Lin, Fredric Newberg, M. Fielding
Publikováno v:
Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97.
Low power wireless sensor networks provide a new monitoring and control capability for civil and military applications in transportation, manufacturing, biomedical technology, environmental management, and safety and security systems. Low power integ
Autor:
Reid A. Brennen, Jill M. Hruby, William D. Bonivert, Dean V. Wiberg, Michael H. Hecht, Ezekiel Kruglick, Steven Manion, Kristofer S. J. Pister
Publikováno v:
SPIE Proceedings.
We have developed fine pitch, sub-collimating X-ray grids for an instrument in the High Energy Solar Spectroscopic Imager (HESSI), a proposed NASA mission. In addition to high- energy X-rays, the instrument requires collimation of photons with energi