Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ezbiansky, Karin"'
Low-temperature deposition of thin films of silicon dioxide suitable for thin film dielectrics are achieved by the fluoride catalyzed decomposition of acetoxyethylsilsesquioxane.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::24a50c324d41fec717e770f8f6639a07
Autor:
Ezbiansky, Karin, Medford, George, Reitz, Hariklia, Potyrailo, Radislav A., Chisholm, Bret J., Morris, William G., Cawse, James N., Flanagan, William P., Hassib, Lamyaa, Molaison, Chris A.
Publikováno v:
MRS Online Proceedings Library; 2003, Vol. 804 Issue 1, p145-152, 8p
Publikováno v:
MRS Online Proceedings Library; 1999, Vol. 606 Issue 1, p1-6, 6p
Publikováno v:
Journal of Chemical Education. Jun96, Vol. 73 Issue 6, p548. 3p. 2 Diagrams, 1 Chart.