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Autor:
Ewert, Tony
Today, micro- and nano-electronic devices are becoming more complex and advanced as the dimensions are shrinking. It is therefore a very challenging task to develop new device technologies with performance that can be predicted. This thesis focuses o
Externí odkaz:
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6883
Publikováno v:
In Microelectronic Engineering 2003 65(4):428-438