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Autor:
Sergey A. Terentiev, A. V. Khomich, Alexander A. Alekseev, Alexey A. Tal, Valeriy A. Dravin, R. A. Khmelnitsky, Evgeniy V. Zavedeev, Andrey A. Khomich
Publikováno v:
Journal of Materials Research. 30:1583-1592
Single-crystalline diamond plates were implanted by He+ ions with a set of energies and fluences that ensure uniform radiation damage (RD) in a 670-nm-thick layer. Implantation is carried out at a wide range of fluences, which allows one to cover the