Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging.

Autor: Moon, Euclid E., Mondol, Mark K., Everett, Patrick N., Smith, Henry I.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 6, p2607-2610, 4p

Interferometric-spatial-phase imaging for six-axis mask control.

Autor: Moon, Euclid E., Chen, Lynn, Everett, Patrick N., Mondol, Mark K., Smith, Henry I.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 6, p3112-3115, 4p

Application of interferometric broadband imaging alignment on an experimental x-ray stepper.

Autor: Moon, Euclid E., Lee, Jawoong, Everett, Patrick N., Smith, Henry I.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3631-3636, 6p

Design of an Nd-Glass Mode-Locked Laser with Frequency Doubling and Pulse Selection.

Autor: Everett, Patrick N.

Publikováno v: Review of Scientific Instruments; Oct1970, Vol. 41 Issue 10, p1495-1500, 6p

Efficient 7-J flashlamp-pumped dye laser at 500-nm wavelength

Autor: Everett, Patrick N., Aldag, Henry R., Ehrlich, John J., Janes, G. Sargent, Klimek, Daniel E., Landers, Franklin M., Pacheco, Dennis P.

Publikováno v: Applied Optics; July 1986, Vol. 25 Issue: 13 p2142-2147, 6p