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pro vyhledávání: '"Evelynn J.R. Mitchell"'
Autor:
Heather C. Galloway, Debbie C. Koeck, Christopher L. Smith, Scott S. Perry, Evelynn J.R. Mitchell, Min Soo Lim, Paul Cao
Publikováno v:
Applied Surface Science. 180:6-13
The influence of four different chemical solutions on the composition, morphology, and etch rates of thin, chemically vapor deposited tungsten films have been investigated. These films are the standard material patterned to create tungsten plugs in i