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pro vyhledávání: '"Evelina Yu. Karas"'
Autor:
Nadegda V. Kurbatova, Evelina Yu. Karas, Il'dus B. Khaibullin, Evgeny I. Shtyrkov, Yakh'ya V. Fattakhov
Publikováno v:
SPIE Proceedings.
It has been shown that during the implantation of some ions with the same energy but different charges, amorphous layers of different thickness are observed. To elucidate the reasons of the effect observed, new experiments using ellipsometric and ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f6c6896a72bf361a73fb91e1507737e
https://doi.org/10.1117/12.131053
https://doi.org/10.1117/12.131053
