Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Evan Oudot"'
Autor:
Vincent Lu, Fuccio Cristiano, Denis Rideau, Remi Beneyton, Nicolas Guitard, Marc Juhel, Edwin Arevalo, Wei Zou, C. Borowiak, Thomas Nassiet, Frederic Monsieur, E. Ghegin, L. Pinzelli, J. Borrel, K. Dabertrand, Romain Duru, L. Clément, Evan Oudot, Sylvain Joblot
Publikováno v:
2018 22nd International Conference on Ion Implantation Technology (IIT).
In this work, heated implantation impact on defect generation is observed for non-amorphizing conditions and specific anneal. Photoluminescence imaging method has been used and exhibits radiative defect density variation with chuck temperature. Moreo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d058f5e1559ff993fd38f7318711151b
https://doi.org/10.1109/iit.2018.8807957
https://doi.org/10.1109/iit.2018.8807957
Autor:
M F Barthe, P Desgardin, M Alemany, Evan Oudot, Mickael Gros-Jean, F. Pierre, A. Chabli, François Bertin
Publikováno v:
Journal of Physics: Conference Series
Journal of Physics: Conference Series, 2017, 791, pp.012019. ⟨10.1088/1742-6596/791/1/012019⟩
Journal of Physics: Conference Series, IOP Publishing, 2017, 791, pp.012019. ⟨10.1088/1742-6596/791/1/012019⟩
Journal of Physics: Conference Series, 2017, 791, pp.012019. ⟨10.1088/1742-6596/791/1/012019⟩
Journal of Physics: Conference Series, IOP Publishing, 2017, 791, pp.012019. ⟨10.1088/1742-6596/791/1/012019⟩
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f79b1f7086f78bd5bceeea0a55d6dba3
https://doi.org/10.1088/1742-6596/791/1/012019
https://doi.org/10.1088/1742-6596/791/1/012019