Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Eunhyuk Choi"'
Publikováno v:
Journal of The Korean Society of Agricultural Engineers. 59:97-110
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f6b3f48fa88cd0fcfd26675357871c93
https://doi.org/10.5389/ksae.2017.59.3.097
https://doi.org/10.5389/ksae.2017.59.3.097
Autor:
Shinji Mikami, Takashi Hirano, Eunhyuk Choi, Hideaki Abe, Motofumi Komori, Masafumi Asano, Woo-Yung Jung, Yongho Kim, Ryoji Yoshikawa, Kazuto Matsuki
Publikováno v:
SPIE Proceedings.
We summarize the metrology and inspection required for the development of nanoimprint lithography (NIL), which is recognized as a candidate for next-generation lithography. Template inspection and residual layer thickness (RLT) metrology are discusse
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc6fd1494158c847557435a055c58599
https://doi.org/10.1117/12.2258369
https://doi.org/10.1117/12.2258369