Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Eung-Ahn Lee"'
Publikováno v:
Transactions on Electrical and Electronic Materials. 10:131-134
The electrical properties and the microstructure of nitrogen-doped poly 3C-SiC films used for micro thermal sensors were studied according to different thicknesses. Poly 3C-SiC films were deposited by LPCVD (low pressure chemical vapor deposition) at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf5747c4a0e1026cb35489743d13dd19
https://doi.org/10.4313/teem.2009.10.4.131
https://doi.org/10.4313/teem.2009.10.4.131
Publikováno v:
Transactions on Electrical and Electronic Materials. 9:101-104
The electrical properties and microstructure of nitrogen-doped poly 3C-SiC films were studied according to different thickness. Poly 3C-SiC films were deposited by LPCVD(low pressure chemical vapor deposition) at and 4 Torr using (100 %, 35 sccm) and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef136a5d2b40353b104f6ece47e91262
https://doi.org/10.4313/teem.2008.9.3.101
https://doi.org/10.4313/teem.2008.9.3.101
Publikováno v:
Transactions on Electrical and Electronic Materials. 8:161-165
In this work, Ni thin films with different thickness from were deposited for the application of micro thermal flow sensors by a magnetron sputtering and oxidized through annealing at with increasing annealing time. The initial variation of resistivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7be26edc86b877c07698475eb2937ff3
https://doi.org/10.4313/teem.2007.8.4.161
https://doi.org/10.4313/teem.2007.8.4.161
Publikováno v:
Sensors and Actuators A: Physical. 125:363-366
In this work, Ni oxide thin films, with thermal sensitivity superior to Pt and Ni thin films, were formed through annealing of Ni films deposited by a r.f. magnetron sputtering. The annealing was carried out in the temperature range of 300–500 °C
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8e0081ce09063e7272fc8c9466b02fc
https://doi.org/10.1016/j.sna.2005.08.005
https://doi.org/10.1016/j.sna.2005.08.005
Publikováno v:
Transactions on Electrical and Electronic Materials. 6:245-248
The physical and electrical properties of polycrystalline -SiC were studied according to different nitrogen doping concentration. Nitrogen-doped SiC films were deposited by LPCVD(1ow pressure chemical vapor deposition) at and 2 torr using (35 sccm) a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28812938a672b32a44625905105a4ba4
https://doi.org/10.4313/teem.2005.6.6.245
https://doi.org/10.4313/teem.2005.6.6.245
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 18:253-258
This paper presents characteristics of CrOx thin-film, which were deposited on O wafer by DC reactive magnetron sputtering in an argon-oxide atmosphere for high temperature applications. The present paper deals with a study of the technological chara
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::065de7b069de3ea69ea16c3739f51f92
https://doi.org/10.4313/jkem.2005.18.3.253
https://doi.org/10.4313/jkem.2005.18.3.253
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 18:169-173
Ni oxide thin films were formed through annealing treatment in the atmosphere after Ni thin films deposited by a r.f. magnetron sputtering method and then electric and material properties were analyzed for application to thermal sensors. Resistivity
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edfefebe26fbc398cfdf0ee9262a3b23
https://doi.org/10.4313/jkem.2005.18.2.169
https://doi.org/10.4313/jkem.2005.18.2.169
Publikováno v:
Journal of Sensor Science and Technology. 14:52-55
Ni oxide thin films with thermal sensitivity superior to Pt and Ni thin films were formed through annealing treatment after Ni thin films were deposited by a r.f. magnetron sputtering method. Resistivity values of Ni oxide thin films were in the rang
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f69fb7a5ff1d67f90923f303597381bb
https://doi.org/10.5369/jsst.2005.14.1.052
https://doi.org/10.5369/jsst.2005.14.1.052
Publikováno v:
Journal of Sensor Science and Technology. 14:56-61
This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical compositi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c8c95cb3887b259867b563a6a9eb807
https://doi.org/10.5369/jsst.2005.14.1.056
https://doi.org/10.5369/jsst.2005.14.1.056
Publikováno v:
Journal of Materials Processing Technology. :266-271
During the warm and hot forging process of steels or aluminum alloys, dies are subject to early fracture and severe wear with the mechanical and thermal shocks. In this work, TiBN hard layer was successfully coated on SKD 61 steel substrate by a plas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e18c3016eba9a768606e165128e14788
https://doi.org/10.1016/s0924-0136(02)00748-3
https://doi.org/10.1016/s0924-0136(02)00748-3