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Autor:
Ethan Falicov, Jessica Marvin, Zhixin Alice Ye, Sergio Fabian Almeida, Daniel S. Contreras, Tsu-Jae King Liu, Matthew Spencer
Publikováno v:
Journal of Microelectromechanical Systems. 31:265-274
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::deccacc7d93b3ed30da051a09382cc04
https://doi.org/10.1109/jmems.2021.3135259
https://doi.org/10.1109/jmems.2021.3135259
